Concepedia

Owendi Ongayi

OO

3

Publications

69

Citations

3

H-Index

2012

Active since

Affiliations

Dow Chemical (United States)(Current)

Owendi Ongayi is an author at Dow Chemical (United States) specializing in engineering, applied physics, and photochemistry.

Top concepts

ChemistryEngineeringPhotochemistryApplied PhysicsOptoelectronicsMaterial ScienceMicroelectronicsElectrical EngineeringInstrumentationPolymer Science

Publications per year

2012–2013

3

Publications

3

High sensitivity chemically amplified EUV resists through enhanced EUV absorption

Owendi Ongayi, Matthew D. Christianson, Matthew M. Meyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 26 citations

Engineering, Chemistry, Molecular Polymer +19

Progress in resolution, sensitivity, and critical dimensional uniformity of EUV chemically amplified resists

James W. Thackeray, James F. Cameron, Vipul Jain et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 24 citations

Engineering, Hp Contact Resolution, Electron-beam Lithography +18

Pursuit of Lower Critical Dimensional Uniformity in EUV Resists

James W. Thackeray, James F. Cameron, Vipul Jain et al. · Journal of Photopolymer Science and Technology · 2013 · 19 citations · Full text

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