Concepedia
Statistics
Publications
6
Citations
85
H-Index
Active since
2002
Affiliations
IMEC(Current)
Hitachi High-Tech (Japan)
ASML (Netherlands)
Hitachi (Japan)
Christiane Jehoul is an author at IMEC specializing in engineering, electrical engineering, and materials science.
Publications per year
2002–2022
Metrology of thin resist for high NA EUVL
Gian F. Lorusso, Christophe Béral, Janusz Bogdanowicz et al. · Metrology, Inspection, and Process Control XXXVI · 2022 · 18 citations
Engineering, Electrical Engineering, Materials Science +13
Computational scanner wafer mark alignment
Boris Menchtchikov, Robert Socha, Sudharshanan Raghunathan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 16 citations
Engineering, Manufacturing Engineering, Digital Fabrication +12
Dependence of the minimal PVD TA(N) sealing thickness on the porosity of Zirkon™ LK dielectric films
Francesca Iacopi, C Zistl, Christiane Jehoul et al. · Microelectronic Engineering · 2002 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +14
SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM
Kazuhisa Hasumi, Osamu Inoue, Yutaka Okagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations
Engineering, Electrical Engineering, Materials Science +12
Improving scanner wafer alignment performance by target optimization
Philippe Leray, Christiane Jehoul, Robert Socha et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations
Engineering, Manufacturing Engineering, Design Automation +12
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