Concepedia

Kazuhisa Hasumi

KH

Statistics

Publications

4

Citations

50

H-Index

4

Active since

2016

Affiliations

Hitachi High-Tech (Japan)(Current)

Hitachi (Japan)

Kazuhisa Hasumi is an author at Hitachi High-Tech (Japan) specializing in device characterization, engineering, and semiconductor devices.

Publications per year

2016–2019

4

Publications

4

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

Kazuhisa Hasumi, Osamu Inoue, Yutaka Okagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

Engineering, Electrical Engineering, Materials Science +12

Review of scanning electron microscope-based overlay measurement beyond 3-nm node device

Osamu Inoue, Kazuhisa Hasumi · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 14 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +17

SEM based overlay measurement between resist and buried patterns

Osamu Inoue, Yutaka Okagawa, Kazuhisa Hasumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

Engineering, Manufacturing Engineering, Materials Science +16

Enabling CD SEM metrology for 5nm technology node and beyond

Gian F. Lorusso, Takeyoshi Ohashi, Astuko Yamaguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

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