Yutaka Okagawa

Fundamentals of overlay measurement and inspection using scanning electron-microscope

Takeshi Kato, Yutaka Okagawa, Osamu Inoue et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Engineering, Manufacturing Engineering, Quality Management +15

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

Kazuhisa Hasumi, Osamu Inoue, Yutaka Okagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

Engineering, Electrical Engineering, Materials Science +12

In-die overlay metrology by using CD-SEM

Osamu Inoue, Takeshi Kato, Yutaka Okagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 12 citations

Engineering, Manufacturing Engineering, Materials Science +16

SEM based overlay measurement between resist and buried patterns

Osamu Inoue, Yutaka Okagawa, Kazuhisa Hasumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

Engineering, Manufacturing Engineering, Materials Science +16

Enabling CD SEM metrology for 5nm technology node and beyond

Gian F. Lorusso, Takeyoshi Ohashi, Astuko Yamaguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17