W. Vandervorst

Semiconductor profiling with sub-nm resolution: Challenges and solutions

W. Vandervorst · Applied Surface Science · 2008 · 77 citations

Engineering, Electrical Engineering, Microelectronics +11

Role of C and B clusters in transient diffusion of B in silicon

N. E. B. Cowern, A. Cacciato, J. S. Custer et al. · Applied Physics Letters · 1996 · 60 citations

Engineering, Materials Engineering, Materials Science +17

High Ge content SGOI substrates obtained by the Ge condensation technique: A template for growth of strained epitaxial Ge

Laurent Souriau, V. Terzieva, W. Vandervorst et al. · Thin Solid Films · 2008 · 30 citations

Engineering, Materials Engineering, Materials Science +14

Improved quantification and detection limits for oxygen analysis in Al<i>x</i>Ga1−<i>x</i> As/GaAs multilayers with secondary ion mass spectroscopy

M. Meuris, W. Vandervorst, G. Borghs · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 23 citations

Natural Sciences, Chemistry, Materials Science +17

New aspects of nanopotentiometry for complementary metal–oxide–semiconductor transistors

Thomas Trenkler, R. J. Stephenson, P. Jansen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 20 citations

Engineering, Electrical Engineering, Materials Science +17