15
Publications
638
Citations
13
H-Index
1981
Active since
Affiliations
L. A. Heimbrook is an author at AT&T (United States) specializing in engineering, applied physics, and chemistry.
Top concepts
EngineeringChemistryApplied PhysicsMaterial SciencePhysicsSpectroscopyNatural SciencesPhysical ChemistrySurface ScienceQuantum Chemistry
Publications per year
1981–1992
15
15
Reactive ion etching of InP using CH4/H2 mixtures: Mechanisms of etching and anisotropy
Todd R. Hayes, M. Dreisbach, W. C. Dautremont–Smith et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 142 citations
Significant Hydrocarbon Film, Engineering, Electron-beam Lithography +19
L. A. Heimbrook, Bryan E. Kohler, Irvin J. Levy · The Journal of Chemical Physics · 1984 · 66 citations
M. E. Gross, Kin P. Cheung, Cass Fleming et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 49 citations
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