Concepedia

Publication | Closed Access

50 nm vertical replacement-gate (VRG) nMOSFETs with ALD HfO2 and Al2O3 gate dielectrics

19

Citations

7

References

2001

Year

J. M. Hergenrother, G. D. Wilk, T. Nigam, F. Klemens, D. Monroe, P. J. Silvėrman, T. Sorsch, B. Busch, M. L. Green, M. R. Baker,

Unknown Venue

References

YearCitations

Page 1