Concepedia

Publication | Closed Access

A preliminary study of SF6 based inductively coupled plasma etching techniques for beta gallium trioxide thin film

DOI

38

Citations

25

References

2015

Year

Hongwei Liang, Yuanpeng Chen, Xiaochuan Xia, Chao Zhang, Rensheng Shen, Yang Liu, Yingmin Luo, Guotong Du
Materials Science in Semiconductor Processing

References

YearCitations

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