Area-selective atomic layer deposition of Ru thin films by chemo-selective inhibition of alkyl aldehyde molecules on nitride surfaces

Modern physical organic chemistry

Choice Reviews Online · 2006 · 2.4K citations

Natural Sciences, Chemistry, Materials Science +17

The use of atomic layer deposition in advanced nanopatterning

Adriaan J. M. Mackus, Ageeth A. Bol, W. M. M. Kessels · Nanoscale · 2014 · 380 citations

Natural Sciences, Materials Engineering, Materials Science +14

Formation of TiO₂ and ZrO₂ Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness

Hyunsu Shin, Daekyun Jeong, Jaegab Lee et al. · Advanced Materials · 2004 · 257 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Area-Selective Atomic Layer Deposition of SiO₂ Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

Alfredo Mameli, Marc J. M. Merkx, Bora Karasulu et al. · ACS Nano · 2017 · 199 citations · Full text

Natural Sciences, Chemistry, Materials Science +12

Area-Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W, and Ru

Dara Bobb-Semple, Katie L. Nardi, Nerissa Draeger et al. · Chemistry of Materials · 2019 · 194 citations

Natural Sciences, Materials Engineering, Materials Science +17