Concepedia

Marc J. M. Merkx

MJ

12

Publications

605

Citations

11

H-Index

2017

Active since

Affiliations

Eindhoven University of Technology(Current)

Federico Santa María Technical University

Lam Research (United States)

Holst Centre (Netherlands)

Eurofins (Netherlands)

Marc J. M. Merkx is an author at Eindhoven University of Technology specializing in surface chemistry, chemical engineering, and engineering.

ORCID

Top concepts

Publications per year

2017–2024

12

Publications

12

Area-Selective Atomic Layer Deposition of SiO<sub>2</sub> Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

Alfredo Mameli, Marc J. M. Merkx, Bora Karasulu et al. · ACS Nano · 2017 · 186 citations · Full text

Area-Selective Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> Nanolayers

Shashank Balasubramanyam, Marc J. M. Merkx, Marcel A. Verheijen et al. · ACS Materials Letters · 2020 · 76 citations · Full text

Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity

Marc J. M. Merkx, Sander Vlaanderen, Tahsin Faraz et al. · Chemistry of Materials · 2020 · 68 citations · Full text

Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO<sub>2</sub>

Marc J. M. Merkx, Tania E. Sandoval, Dennis M. Hausmann et al. · Chemistry of Materials · 2020 · 64 citations · Full text

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Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors

Marc J. M. Merkx, Athanasios Angelidis, Alfredo Mameli et al. · The Journal of Physical Chemistry C · 2022 · 51 citations · Full text

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