Alfredo Mameli

Area-Selective Atomic Layer Deposition of SiO₂ Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

Alfredo Mameli, Marc J. M. Merkx, Bora Karasulu et al. · ACS Nano · 2017 · 199 citations · Full text

Natural Sciences, Chemistry, Materials Science +12

Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition

Alfredo Mameli, Bora Karasulu, Marcel A. Verheijen et al. · Chemistry of Materials · 2019 · 92 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Area-Selective Atomic Layer Deposition of In₂O₃:H Using a μ-Plasma Printer for Local Area Activation

Alfredo Mameli, Yinghuan Kuang, Morteza Aghaee et al. · Chemistry of Materials · 2017 · 70 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Isotropic Atomic Layer Etching of ZnO Using Acetylacetone and O₂ Plasma

Alfredo Mameli, Marcel A. Verheijen, Adriaan J. M. Mackus et al. · ACS Applied Materials & Interfaces · 2018 · 59 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors

Marc J. M. Merkx, Athanasios Angelidis, Alfredo Mameli et al. · The Journal of Physical Chemistry C · 2022 · 58 citations · Full text

Natural Sciences, Chemical Engineering, Chemistry +17