Tania E. Sandoval

Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO₂

Marc J. M. Merkx, Tania E. Sandoval, Dennis M. Hausmann et al. · Chemistry of Materials · 2020 · 72 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Role of Precursor Choice on Area-Selective Atomic Layer Deposition

Il‐Kwon Oh, Tania E. Sandoval, Tzu‐Ling Liu et al. · Chemistry of Materials · 2021 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +17

Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors

Marc J. M. Merkx, Athanasios Angelidis, Alfredo Mameli et al. · The Journal of Physical Chemistry C · 2022 · 58 citations · Full text

Natural Sciences, Chemical Engineering, Chemistry +17

Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation

Pengmei Yu, Marc J. M. Merkx, Ilker Tezsevin et al. · Applied Surface Science · 2024 · 35 citations · Full text

Natural Sciences, Chemistry, Materials Science +17

Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al₂O₃ with a Series of Al(CH₃)_<i>x</i>Cl_3–<i>x</i> and Al(C_<i>y</i>H_2<i>y</i>+1)₃ Precursors

Il‐Kwon Oh, Tania E. Sandoval, Tzu‐Ling Liu et al. · Journal of the American Chemical Society · 2022 · 33 citations

Natural Sciences, Chemistry, Materials Science +17