Concepedia

Tahsin Faraz

TF

Statistics

Publications

16

Citations

935

H-Index

15

Active since

2012

Affiliations

Eindhoven University of Technology(Current)

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich Schiller University Jena

Eurofins (Netherlands)

Oxford Instruments (United Kingdom)

Tahsin Faraz is an author at Eindhoven University of Technology specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

2012–2022

16

Publications

16

Status and prospects of plasma-assisted atomic layer deposition

Harm C. M. Knoops, Tahsin Faraz, Karsten Arts et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 207 citations · Full text

, , +15

Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?

Tahsin Faraz, F. Roozeboom, Harm C. M. Knoops et al. · ECS Journal of Solid State Science and Technology · 2015 · 144 citations · Full text

, , +16

Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

Tahsin Faraz, Harm C. M. Knoops, Marcel A. Verheijen et al. · ACS Applied Materials & Interfaces · 2018 · 108 citations · Full text

Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

Tahsin Faraz, Karsten Arts, Saurabh Karwal et al. · Plasma Sources Science and Technology · 2018 · 86 citations · Full text

Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity

Marc J. M. Merkx, Sander Vlaanderen, Tahsin Faraz et al. · Chemistry of Materials · 2020 · 68 citations · Full text

1–5 of 16