Tahsin Faraz

Status and prospects of plasma-assisted atomic layer deposition

Harm C. M. Knoops, Tahsin Faraz, Karsten Arts et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 216 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?

Tahsin Faraz, F. Roozeboom, Harm C. M. Knoops et al. · ECS Journal of Solid State Science and Technology · 2015 · 149 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

Tahsin Faraz, Harm C. M. Knoops, Marcel A. Verheijen et al. · ACS Applied Materials & Interfaces · 2018 · 112 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

Tahsin Faraz, Karsten Arts, Saurabh Karwal et al. · Plasma Sources Science and Technology · 2018 · 91 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity

Marc J. M. Merkx, Sander Vlaanderen, Tahsin Faraz et al. · Chemistry of Materials · 2020 · 75 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17