Saurabh Karwal

Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO₂ as an Electron Transport Layer in Planar Perovskite Solar Cells

Yinghuan Kuang, Valerio Zardetto, Roderick van Gils et al. · ACS Applied Materials & Interfaces · 2018 · 149 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS₂: large area, thickness control and tuneable morphology

Akhil Sharma, Marcel A. Verheijen, Longfei Wu et al. · Nanoscale · 2018 · 119 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

Tahsin Faraz, Harm C. M. Knoops, Marcel A. Verheijen et al. · ACS Applied Materials & Interfaces · 2018 · 112 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

Tahsin Faraz, Karsten Arts, Saurabh Karwal et al. · Plasma Sources Science and Technology · 2018 · 91 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Low resistivity HfN_x grown by plasma-assisted ALD with external rf substrate biasing

Saurabh Karwal, Marcel A. Verheijen, B. L. Williams et al. · Journal of Materials Chemistry C · 2018 · 42 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17