Concepedia

Karsten Arts

KA

Statistics

Publications

14

Citations

669

H-Index

13

Active since

2017

Affiliations

Eindhoven University of Technology(Current)

Oxford Instruments (United Kingdom)

Aalto University

Tieto (Finland)

VTT Technical Research Centre of Finland

Karsten Arts is an author at Eindhoven University of Technology specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

2017–2022

14

Publications

14

Status and prospects of plasma-assisted atomic layer deposition

Harm C. M. Knoops, Tahsin Faraz, Karsten Arts et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 207 citations · Full text

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Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

Tahsin Faraz, Karsten Arts, Saurabh Karwal et al. · Plasma Sources Science and Technology · 2018 · 86 citations · Full text

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Karsten Arts, Vincent Vandalon, Riikka L. Puurunen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 52 citations · Full text

, , +17

Foundations of atomic-level plasma processing in nanoelectronics

Karsten Arts, Satoshi Hamaguchi, Tomoko Ito et al. · Plasma Sources Science and Technology · 2022 · 52 citations · Full text

, , +17

Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO<sub>2</sub>, TiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, and HfO<sub>2</sub>

Karsten Arts, Mikko Utriainen, Riikka L. Puurunen et al. · The Journal of Physical Chemistry C · 2019 · 48 citations · Full text

, , +19

1–5 of 14