Concepedia

Nerissa Draeger

ND

4

Publications

336

Citations

4

H-Index

2018

Active since

Affiliations

Lam Research (United States)(Current)

Stanford University

Nerissa Draeger is an author at Lam Research (United States) specializing in chemical engineering, materials engineering, and microfabrication.

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Publications per year

2018–2020

4

Publications

4

Area-Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W, and Ru

Dara Bobb-Semple, Katie L. Nardi, Nerissa Draeger et al. · Chemistry of Materials · 2019 · 183 citations

CMOS-Compatible Catalyst for MacEtch: Titanium Nitride-Assisted Chemical Etching in Vapor phase for High Aspect Ratio Silicon Nanostructures

Jeong Dong Kim, Munho Kim, Clarence Chan et al. · ACS Applied Materials & Interfaces · 2019 · 68 citations

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Effect of Multilayer versus Monolayer Dodecanethiol on Selectivity and Pattern Integrity in Area-Selective Atomic Layer Deposition

Tzu‐Ling Liu, Katie L. Nardi, Nerissa Draeger et al. · ACS Applied Materials & Interfaces · 2020 · 44 citations

Formation and Ripening of Self-Assembled Multilayers from the Vapor-Phase Deposition of Dodecanethiol on Copper Oxide

David S. Bergsman, Tzu‐Ling Liu, Richard G. Closser et al. · Chemistry of Materials · 2018 · 41 citations · Full text

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