Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma

Plasma etching: Yesterday, today, and tomorrow

Vincent M. Donnelly, A. Kornblit · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 809 citations

Materials Science, Electrical Engineering, Plasma Electronics +14

Understanding plasma spraying

P. Fauchais · Journal of Physics D Applied Physics · 2004 · 741 citations

Thermal Spray Coating, Plasma Torches, Actual Knowledge +5

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 593 citations

Plasma Situations, Selective Etching, Engineering +16

Surface science aspects of etching reactions

Harold F. Winters, J. W. Coburn · Surface Science Reports · 1992 · 493 citations

Materials Science, Engineering, Surface Science +5

Conductance considerations in the reactive ion etching of high aspect ratio features

J. W. Coburn, Harold F. Winters · Applied Physics Letters · 1989 · 182 citations

Engineering, Electron-beam Lithography, Vacuum Device +17