Concepedia

Seonjeong Maeng

SM

Statistics

Publications

4

Citations

61

H-Index

4

Active since

2022

Affiliations

Korea University of Science and Technology(Current)

SK Group (South Korea)

Korea Research Institute of Standards and Science

Daejeon University

Hanyang University

Seonjeong Maeng is an author at Korea University of Science and Technology specializing in surface science, chemical engineering, and applied physics.

ORCID

Top concepts

Publications per year

2022–2023

4

Publications

4

Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma

Jongho So, MinJoong Kim, Hyuksung Kwon et al. · Applied Surface Science · 2023 · 30 citations

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Reduced amount of contamination particle generated by CF4/Ar/O2 plasma corrosion of Y2O3 materials: Influence of defluorination process

MinJoong Kim, Eunmi Choi, Jongho So et al. · Materials Science in Semiconductor Processing · 2023 · 11 citations

Decomposition Characteristics of the TTIP (Tetraisopropyl Orthotitanate) Precursor for Atomic Layer Deposition

Hayeong Kim, Jihyeok An, Seonjeong Maeng et al. · Materials · 2022 · 10 citations · Full text

The effects of decomposition of CpZr(NMe2)3 on atomic layer deposition for high-k ZrO2 thin films

Eunmi Choi, Hayeong Kim, Seonjeong Maeng et al. · Materials Today Communications · 2022 · 10 citations · Full text

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