PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch

Abstract

We evaluate Power-Performance-Area & Cost (PPAC) for nanosheet (NS), forksheet (FS), monolithic & sequential Complementary FET (CFET) at 5 & 4 track (T) designs with tight gate pitch (CPP) & metal pitch (MP). While NS & FS prove unsuitable for 4T designs, CFETs provide a performant & cost-effective 4T solution.