High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Measurement technologies for precision positioning

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A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

Xinghui Li, Wei Gao, Hiroshi Muto et al. · Precision Engineering · 2013 · 197 citations

Engineering, Mechatronics Engineering, Robotics Engineering +7

Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements

Hung-Lin Hsieh, Ssu-Wen Pan · Optics Express · 2015 · 154 citations · Full text

Engineering, Electrical Engineering, Mechatronics Engineering +17

A Three-axis Displacement Sensor with Nanometric Resolution

Wei Gao, Akihide Kimura · CIRP Annals · 2007 · 102 citations

Engineering, Mechatronics Engineering, Metrology +13

Towards ultimate optical lithography with NXT:1950i dual stage immersion platform

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Engineering, Electrical Engineering, Microfabrication +12