Statistics
Publications
4
Citations
156
H-Index
4
Active since
2009
Affiliations
ASML (Netherlands)(Current)
Frank van de Mast is an author at ASML (Netherlands) specializing in immersion lithography, engineering, and manufacturing engineering.
Publications per year
2009–2016
4
4
Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system
Fred de Jong, Bert van der Pasch, Tom Castenmiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +13
1–4 of 4