Concepedia

Frank van de Mast

FV

4

Publications

151

Citations

4

H-Index

2009

Active since

Affiliations

ASML (Netherlands)(Current)

Frank van de Mast is an author at ASML (Netherlands) specializing in engineering, 3d printing, and applied physics.

Top concepts

3D PrintingEngineeringTechnologyApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationDesignPhysicsEducation

Publications per year

2009–2016

4

Publications

4

Towards ultimate optical lithography with NXT:1950i dual stage immersion platform

Tom Castenmiller, Frank van de Mast, Toine de Kort et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 84 citations

Engineering, Electron-beam Lithography, Optic Design +16

Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system

Fred de Jong, Bert van der Pasch, Tom Castenmiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 29 citations

Engineering, Electron-beam Lithography, Optical Testing +20

A study of swing-curve physics in diffraction-based overlay

Kaustuve Bhattacharyya, Arie den Boef, Greet Storms et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 23 citations

Engineering, Wave Optic, Target Fabrication +17

Overlay improvements using a real time machine learning algorithm

Emil Schmitt-Weaver, Michael Kubis, Wolfgang Henke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 15 citations

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