Statistics
Publications
1
Citations
30
H-Index
1
Active since
2009
Affiliations
ASML (Netherlands)(Current)
Bert van der Pasch is an author at ASML (Netherlands) specializing in precision position measurement, optoelectronics, and interferometry.
Publications per year
2009–2009
1
1
Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system
Fred de Jong, Bert van der Pasch, Tom Castenmiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +13
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