Concepedia

Tom Castenmiller

TC

3

Publications

142

Citations

3

H-Index

2001

Active since

Affiliations

ASML (Netherlands)(Current)

Tom Castenmiller is an author at ASML (Netherlands) specializing in technology, optoelectronics, and microelectronics.

Top concepts

Publications per year

2001–2010

3

Publications

3

Towards ultimate optical lithography with NXT:1950i dual stage immersion platform

Tom Castenmiller, Frank van de Mast, Toine de Kort et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 84 citations

, , +16

Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system

Fred de Jong, Bert van der Pasch, Tom Castenmiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 29 citations

, , +20

Performance results of a new generation of 300-mm lithography systems

Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations

Rows per page

1–3 of 3