Statistics
Publications
3
Citations
147
H-Index
3
Active since
2001
Affiliations
ASML (Netherlands)(Current)
Tom Castenmiller is an author at ASML (Netherlands) specializing in engineering, integrated circuit design, and optical lithography.
Publications per year
2001–2010
3
3
Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system
Fred de Jong, Bert van der Pasch, Tom Castenmiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +13
Performance results of a new generation of 300-mm lithography systems
Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations
Engineering, Electrical Engineering, Manufacturing Engineering +9
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