Statistics
Publications
2
Citations
41
H-Index
2
Active since
2001
Affiliations
ASML (Netherlands)(Current)
Boudewijn Sluijk is an author at ASML (Netherlands) specializing in semiconductor devices, integrated circuit design, and manufacturing engineering.
Publications per year
2001–2022
2
2
Performance results of a new generation of 300-mm lithography systems
Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations
Engineering, Electrical Engineering, Manufacturing Engineering +9
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond
Martin van den Brink, Anthony Yen, Paul van Wijnen et al. · 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) · 2022 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +15
1–2 of 2