Akihide Kimura

A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement

Akihide Kimura, Wei Gao, WooJae Kim et al. · Precision Engineering · 2012 · 137 citations

Engineering, Coherent Gradient Sensing, Microfabrication +8

Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness

Akihide Kimura, Wei Gao, Yoshikazu Arai et al. · Precision Engineering · 2009 · 104 citations

Engineering, Measurement, Calibration +6

A Three-axis Displacement Sensor with Nanometric Resolution

Wei Gao, Akihide Kimura · CIRP Annals · 2007 · 101 citations

Nanometric Resolution, Engineering, Coherent Gradient Sensing +6

A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

Wei Gao, Akihide Kimura · CIRP Annals · 2010 · 45 citations

Geometric Modeling, Calibration, Optic Design +7

Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder

Akihide Kimura, Wei Gao, Zeng Li-jiang · Measurement Science and Technology · 2010 · 42 citations

Engineering, Measurement, Optical Testing +21