A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement

New formulation of the Fourier modal method for crossed surface-relief gratings

Lifeng Li · Journal of the Optical Society of America A · 1997 · 984 citations

Numerical Analysis, Optical Materials, New Formulation +22

Probing Systems in Dimensional Metrology

Albert Weckenmann, Tyler Estler, G.N. Peggs et al. · CIRP Annals · 2004 · 329 citations

Engineering, Geometry, Measurement +8

Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

Wei Gao, Takeshi Araki, Satoshi KIYONO et al. · Precision Engineering · 2003 · 300 citations

Precision Nano-fabrication, Engineering, Flexible Electronics +7

The long-range scanning stage: a novel platform for scanned-probe microscopy

Mike Holmes, R.J. Hocken, David L. Trumper · Precision Engineering · 2000 · 156 citations

High Resolution, Long-range Scanning Stage, Microscope Image Processing +10

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Wei Gao, Shuichi Dejima, Hiroaki Yanai et al. · Precision Engineering · 2004 · 137 citations

Robot Kinematics, Motion Control, Engineering +11