Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder - Concepedia

Concepedia

Publication | Closed Access

Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

300

Citations

28

References

2003

Year

Wei Gao, Takeshi Araki, Satoshi KIYONO, Yuichi Okazaki, Masashi YAMANAKA

Precision Engineering

Precision Nano-fabricationEngineeringFlexible ElectronicsMicrofabricationNanotechnologyApplied PhysicsSurface EncoderNanofabrication3D PrintingNanolithography Method

References

	Year	Citations

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