Concepedia

Grating-based Metrology

Grating-Based Metrology is a measurement methodology within optical metrology that employs diffraction gratings as precision reference structures to enable high-resolution displacement, deformation, or surface characterization through the analysis of interference or diffraction patterns.

485

Publications

16.3K

Citations

1.5K

Authors

411

Institutions

Publications per year

2017–2026

68

Parents

Publications

485

Applications of long-period gratings to single and multi-parameter sensing

Vikram Bhatia · Optics Express · 1999 · 501 citations · Full text

, , +13

Tilted short-period fibre-Bragg-grating-induced coupling to cladding modes for accurate refractometry

Guillaume Laffont, Pierre Ferdinand · Measurement Science and Technology · 2001 · 365 citations

, , +16

Optical Methods for Dimensional Metrology in Production Engineering

H. Schwenke, Ulrich Neuschaefer-Rube, Tilo Pfeifer et al. · CIRP Annals · 2002 · 299 citations

, , +16

Automated phase-measuring profilometry using defocused projection of a Ronchi grating

Xianyu Su, Wensen Zhou, Gert von Bally et al. · Optics Communications · 1992 · 277 citations

, , +15

Step height measurement using two-wavelength phase-shifting interferometry

Katherine Creath · Applied Optics · 1987 · 260 citations

, , +16

1–5 of 485

Authors

1.5K

  1. JR
    John R. McNeil

    University of New Mexico, United States

    8 publications · 341 citations

    8

    h-index

  2. ML
    Mark L. Schattenburg

    Massachusetts Institute of Technology, United States

    6 publications · 227 citations

    6

    h-index

  3. WG
    Wei Gao

    Tohoku University, Japan

    6 publications · 182 citations

    6

    h-index

  4. MW
    M. Wurm

    Technical University of Munich, Germany

    6 publications · 128 citations

    6

    h-index

  5. BB
    Bernd Bodermann

    Physikalisch-Technische Bundesanstalt, Germany

    6 publications · 128 citations

    6

    h-index

1–5 of 1.5K

Institutions

411

  1. Tsinghua University

    Beijing, China

    14 h-index

    46 publications

    1.5K citations

  2. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    13 h-index

    81 publications

    3.7K citations

  3. Sichuan University

    Chengdu, China

    12 h-index

    48 publications

    2.3K citations

  4. National Institute of Standards and Technology

    Gaithersburg, United States

    12 h-index

    50 publications

    1.5K citations

  5. Chinese Academy of Sciences

    Beijing, China

    11 h-index

    54 publications

    1.5K citations

  6. Massachusetts Institute of Technology

    Cambridge, United States

    10 h-index

    35 publications

    1.3K citations

  7. Helmholtz-Zentrum Berlin für Materialien und Energie

    Berlin, Germany

    10 h-index

    38 publications

    1.1K citations

  8. University of New Mexico

    Albuquerque, United States

    9 h-index

    38 publications

    1.7K citations

1–8 of 411

Venues

  1. Applied Optics

    72 publications · 2.7K citations

    28

    h-index

  2. Optics Express

    32 publications · 1.5K citations

    21

    h-index

  3. 19

    h-index

  4. Optics Letters

    27 publications · 932 citations

    18

    h-index

  5. Optical Engineering

    27 publications · 850 citations

    17

    h-index

1–5