Concepedia

John R. McNeil

JR

Statistics

Publications

46

Citations

1.4K

H-Index

22

Active since

1975

Affiliations

University of New Mexico(Current)

Colorado State University

National Institute of Standards and Technology

United States Air Force Academy

Ghulam Ishaq Khan Institute of Engineering Sciences and Technology

John R. McNeil is an author at University of New Mexico specializing in natural sciences, materials science, and materials engineering.

Publications per year

1975–2008

46

Publications

46

Ion-assisted deposition of optical thin films: low energy vs high energy bombardment

John R. McNeil, Alan C. Barron, Scott R. Wilson et al. · Applied Optics · 1984 · 142 citations

, , +7

Multiparameter grating metrology using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 108 citations

, , +17

Neutral Ion Beam Figuring Of Large Optical Surfaces

Scott R. Wilson, John R. McNeil · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1987 · 80 citations

, , +10

Metrology of subwavelength photoresist gratings using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, S. Sohail et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 70 citations

, , +16

Properties of TiO_2 and SiO_2 thin films deposited using ion assisted deposition

John R. McNeil, G. A. Al‐Jumaily, K. C. Jungling et al. · Applied Optics · 1985 · 62 citations

, , +17

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