Steven L. Prins

Multiparameter grating metrology using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 106 citations

Optical Materials, Engineering, Electron-beam Lithography +29

Dynamics and coherence of a multimode semiconductor laser with optical feedback in an intermediate-length external-cavity regime

Carles Serrat, Steven L. Prins, R. Vilaseca · Physical Review A · 2003 · 21 citations

Quantum Photonics, Engineering, Laser Science +17

Using scattered-light modeling for semiconductor critical dimension metrology and calibration

Richard H. Krukar, Steven L. Prins, D. M. Krukar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 14 citations

Engineering, Microscopy, Optical Testing +20

Effect of stress on performance of dense wavelength division multiplexing filters: optical properties

Steven L. Prins, Alan C. Barron, W. C. Herrmann et al. · Applied Optics · 2004 · 11 citations

<title>Multiparameter CD measurements using scatterometry</title>

Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +19