Concepedia

Richard H. Krukar

RH

3

Publications

69

Citations

3

H-Index

1993

Active since

Affiliations

University of New Mexico(Current)

AT&T (United States)

Richard H. Krukar is an author at University of New Mexico specializing in microscopy, instrumentation, and optical properties.

Top concepts

PhysicsMicroscopyEngineeringApplied PhysicsInstrumentationLaser FabricationOptical PropertiesPhotonicsCalibrationOptoelectronics

Publications per year

1993–1994

3

Publications

3

Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles

S. Sohail H. Naqvi, James E. Franke, David M. Haaland et al. · Journal of the Optical Society of America A · 1994 · 38 citations

Engineering, Pls Calibration Model, Microscopy +26

Reactive ion etching profile and depth characterization using statistical and neural network analysis of light scattering data

Richard H. Krukar, A. Kornblit, Linda A. Clark et al. · Journal of Applied Physics · 1993 · 17 citations

Engineering, Electron-beam Lithography, Microscopy +26

Using scattered-light modeling for semiconductor critical dimension metrology and calibration

Richard H. Krukar, Steven L. Prins, D. M. Krukar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 14 citations

Engineering, Microscopy, Optical Testing +20

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