Concepedia

D. M. Krukar

DM

1

Publications

14

Citations

1

H-Index

1993

Active since

Affiliations

University of New Mexico(Current)

D. M. Krukar is an author at University of New Mexico specializing in instrumentation, optical properties, and optical metrology.

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Publications per year

1993–1993

1

Publications

1

Using scattered-light modeling for semiconductor critical dimension metrology and calibration

Richard H. Krukar, Steven L. Prins, D. M. Krukar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 14 citations

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