S. Sohail H. Naqvi

Ellipsometric scatterometry for the metrology of sub-01-μm-linewidth structures

Babar K. Minhas, Stephen A. Coulombe, S. Sohail H. Naqvi et al. · Applied Optics · 1998 · 62 citations

Engineering, Measurement, Microscopy +20

Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles

S. Sohail H. Naqvi, James E. Franke, David M. Haaland et al. · Journal of the Optical Society of America A · 1994 · 38 citations

Engineering, Pls Calibration Model, Microscopy +26

Scatterometry measurement of sub-0.1 μm linewidth gratings

Stephen A. Coulombe, Babar K. Minhas, Christopher J. Raymond et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 26 citations

Photonic Sensor, Optical Materials, Incident Wavelength +23

Linewidth measurement of gratings on photomasks: a simple technique

S. Sohail H. Naqvi, Susan M. Gaspar, K. C. Hickman et al. · Applied Optics · 1992 · 24 citations

Optical Materials, Engineering, Measurement +17

<title>Grating line shape characterization using scatterometry</title>

Kenneth P. Bishop, Susan M. Gaspar, Lisa-Michelle Milner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 19 citations

Geometric Modeling, Engineering, Coherent Gradient Sensing +15