Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 19 citations · 0 references
Geometric ModelingEngineeringCoherent Gradient SensingDiffractive OpticGratingsNatural SciencesDimensional ParametersGeometrical OpticScatter CharacteristicsComputational ImagingInverse ProblemsComputational ElectromagneticsCurve FittingSurface ModelingOptical System AnalysisShape RepresentationGeometry ProcessingRigorous Diffraction Model
Identification of dimensional parameters of an arbitrarily shaped grating using scatter characteristics is presented. A rigorous diffraction model is used to predict the scatter from a known grating structure, and utilizing this information we perform the inverse problem of predicting line shape from a measurement of the scatter.