Concepedia

Susan M. Gaspar

SM

3

Publications

54

Citations

3

H-Index

1991

Active since

Affiliations

University of New Mexico(Current)

Susan M. Gaspar is an author at University of New Mexico specializing in engineering, optical properties, and ophthalmology.

Top concepts

EngineeringGratingsOphthalmologyOptoelectronicsOptical MaterialsOptical PropertiesMedicinePhotonicsMicroscopy3D Printing

Publications per year

1991–1992

3

Publications

3

Linewidth measurement of gratings on photomasks: a simple technique

S. Sohail H. Naqvi, Susan M. Gaspar, K. C. Hickman et al. · Applied Optics · 1992 · 24 citations

Optical Materials, Engineering, Measurement +17

<title>Grating line shape characterization using scatterometry</title>

Kenneth P. Bishop, Susan M. Gaspar, Lisa-Michelle Milner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 19 citations

Geometric Modeling, Engineering, Coherent Gradient Sensing +15

Use of diffracted light from latent images to improve lithography control

K. C. Hickman, Susan M. Gaspar, Kenneth P. Bishop et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 11 citations

Optical Engineering, Optical Materials, Engineering +22

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