Christopher J. Raymond

Multiparameter grating metrology using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 108 citations

Natural Sciences, Materials Engineering, Materials Science +17

Overview Of Scatterometry Applications In High Volume Silicon Manufacturing

Christopher J. Raymond · AIP conference proceedings · 2005 · 75 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Metrology of subwavelength photoresist gratings using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, S. Sohail et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 70 citations

Engineering, Materials Engineering, Physics +16

Comparison of solutions to the scatterometry inverse problem

Christopher J. Raymond, Michael E. Littau, A.D. Chuprin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 43 citations

Natural Sciences, Physics, Metrology +16

Scatterometry measurement of sub-0.1 μm linewidth gratings

Stephen A. Coulombe, Babar K. Minhas, Christopher J. Raymond et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 26 citations

Engineering, Materials Engineering, Materials Science +14