S. Sohail is an author at University of New Mexico specializing in engineering, optical properties, and photonic metrology.
Top concepts
EngineeringMicroscopyLength MetrologyOptical MetrologyOrganic PhotonicsOptical PropertiesPhotonic MetrologyGratingsMedicineCalibration
Publications per year
1994–2011
4
4
Multiparameter grating metrology using optical scatterometry
Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 106 citations
Optical Materials, Engineering, Electron-beam Lithography +29
Rows per page
1–4 of 4