Michael R. Murnane is an author at University of New Mexico specializing in microscopy, engineering, and optical materials.
Top concepts
MicroscopyEngineeringGratingsThin FilmsCalibrationMeasurementApplied PhysicsLength MetrologyMaterial ScienceLaser Fabrication
Publications per year
1995–1997
3
3
Multiparameter grating metrology using optical scatterometry
Christopher J. Raymond, Michael R. Murnane, Steven L. Prins et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 106 citations
Optical Materials, Engineering, Electron-beam Lithography +29
Rows per page
1–3 of 3