Concepedia

Michael E. Littau

ME

3

Publications

97

Citations

3

H-Index

2000

Active since

Affiliations

Optica(Current)

Michael E. Littau is an author at Optica specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2000–2004

3

Publications

3

Comparison of solutions to the scatterometry inverse problem

Christopher J. Raymond, Michael E. Littau, A.D. Chuprin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 43 citations

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa, Michael E. Littau, V. Pohray et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 43 citations

, , +27

Applications of angular scatterometry for the measurement of multiply periodic features

Christopher J. Raymond, Michael E. Littau, Chang-Jin Sohn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 11 citations

, , +23

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