Concepedia

V. Pohray

VP

1

Publications

43

Citations

1

H-Index

2000

Active since

Affiliations

University of New Mexico(Current)

V. Pohray is an author at University of New Mexico specializing in integrated circuits, polymer chemistry, and materials fabrication.

Top concepts

Publications per year

2000–2000

1

Publications

1

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa, Michael E. Littau, V. Pohray et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 43 citations

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