Concepedia

Mark J. Sowa

MJ

12

Publications

278

Citations

11

H-Index

1983

Active since

Affiliations

Veeco (United States)(Current)

Lehigh University

University of New Mexico

Stanford University

Princeton Plasma Physics Laboratory

Mark J. Sowa is an author at Veeco (United States) specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

1983–2023

12

Publications

12

Helicon plasma source excited by a flat spiral coil

J. Stevens, Mark J. Sowa, J.L. Cecchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 66 citations

, , +8

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa, Michael E. Littau, V. Pohray et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 43 citations

, , +27

Plasma-enhanced atomic layer deposition of superconducting niobium nitride

Mark J. Sowa, Yonas T. Yemane, Jinsong Zhang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 29 citations

, , +12

Uniformity of radio frequency bias voltages along conducting surfaces in a plasma

J. Stevens, Mark J. Sowa, J.L. Cecchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 27 citations

, , +16

Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

Yonas T. Yemane, Mark J. Sowa, Jingyuan Zhang et al. · Superconductor Science and Technology · 2017 · 18 citations

, , +14

Rows per page

1–5 of 12