Mark J. Sowa

Helicon plasma source excited by a flat spiral coil

J. Stevens, Mark J. Sowa, J.L. Cecchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 66 citations

Magnetism, End-launch Antenna Configuration, Engineering +8

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa, Michael E. Littau, V. Pohray et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 43 citations

Engineering, Plasma Combustion, Integrated Circuits +27

Plasma-enhanced atomic layer deposition of superconducting niobium nitride

Mark J. Sowa, Yonas T. Yemane, Jinsong Zhang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 29 citations

Materials Science, Superconducting Material, Chemical Engineering +12

Uniformity of radio frequency bias voltages along conducting surfaces in a plasma

J. Stevens, Mark J. Sowa, J.L. Cecchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 27 citations

Engineering, Surface Wave, Plasma Science +16

Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

Yonas T. Yemane, Mark J. Sowa, Jingyuan Zhang et al. · Superconductor Science and Technology · 2017 · 18 citations

Materials Science, Superconducting Material, Rf Cavities +14