Microfabrication of Piezoelectric MEMS

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

Natural Sciences, Electrical Engineering, Physics +17

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2000 · 374 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Paul Muralt, Thomas Maeder, Laurent Sagalowicz et al. · Journal of Applied Physics · 1998 · 269 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Micromachined high frequency ferroelectric sonar transducers

Jonathan Bernstein, S. Finberg, K. Houston et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1997 · 266 citations

Engineering, Materials Science, Mechanical Engineering +17