Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

Microgyroscope Temperature Effects and Compensation-Control Methods

Dunzhu Xia, Shourong Wang, Hongsheng Li · Sensors · 2009 · 88 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Accurate Assessment of Packaging Stress Effects on MEMS Sensors by Measurement and Sensor–Package Interaction Simulations

Xin Zhang, Seungbae Park, Michael W. Judy · Journal of Microelectromechanical Systems · 2007 · 82 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis

Yong Zhu, Horacio D. Espinosa · Journal of Micromechanics and Microengineering · 2004 · 80 citations

Engineering, Electrical Engineering, Materials Science +17

Deformation Behavior of MEMS Gyroscope Sensor Package Subjected to Temperature Change

Jinwon Joo, Sung‐Hoon Choa · IEEE Transactions on Components and Packaging Technologies · 2007 · 64 citations

Engineering, Mechanical Engineering, Mechanical Behavior Of Materials +16

Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network

Shudong Wang, Weilong Zhu, Yajing Shen et al. · Sensors and Actuators A Physical · 2020 · 60 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16