Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

Bichitra Nanda Sahoo, Soyoung Han, Hyuntae Kim, Keita Ando, Tae‐Gon Kim, Bong-Kyun Kang, Andreas Klipp, Nagendra Prasad Yerriboina, Jin-Goo Park

Ultrasonics Sonochemistry · 2021 · 16 citations · 41 references

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