Bong-Kyun Kang

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning

Bong-Kyun Kang, Minsu Kim, Jin-Goo Park · Ultrasonics Sonochemistry · 2014 · 56 citations

Natural Sciences, Physics, Acoustics +16

Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask

Seungho Lee, Bong-Kyun Kang, Min-Su Kim et al. · Japanese Journal of Applied Physics · 2012 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +15

Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

Bichitra Nanda Sahoo, Soyoung Han, Hyuntae Kim et al. · Ultrasonics Sonochemistry · 2021 · 20 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Characteristics of indium incorporation in InGaN/GaN multiple quantum wells grown on a-plane and c-plane GaN

Keun-Man Song, Jong‐Min Kim, Bong-Kyun Kang et al. · Applied Physics Letters · 2012 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Effect of Acoustic Cavitation on Dissolved Gases and their Characterization during Megasonic Cleaning

Bong-Kyun Kang, Minsu Kim, Seungho Lee et al. · ECS Transactions · 2011 · 16 citations

Natural Sciences, Materials Science, Physics +15