Concepedia

Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition

Yoonseo Jang, Dohwan Jung, Prakash R. Sultane, Eric S. Larsen, Christopher W. Bielawski, Jungwoo Oh

Applied Surface Science · 2021 · 18 citations · 33 references

Open access

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsAtomic Layer DepositionCoatingsOxide SemiconductorsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFilm Growth MechanismsLow-temperature GrowthPlasma-enhanced Atomic Layer DepositionPlasma-enhanced DepositionThin Oxide FilmsThin Oxide LayersThin-film Growth Mechanisms

References

33

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

High dielectric constant gate oxides for metal oxide Si transistors

John Robertson · Reports on Progress in Physics · 2005 · 1.7K citations

Engineering, Materials Engineering, Materials Science +17

Atomic layer deposition (ALD): from precursors to thin film structures

Markku Leskelä, Mikko Ritala · Thin Solid Films · 2002 · 1.3K citations

Natural Sciences, Materials Engineering, Materials Science +14

Thermodynamic stability of binary oxides in contact with silicon

K. J. Hubbard, Darrell G. Schlom · Journal of materials research/Pratt's guide to venture capital sources · 1996 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +14

Quantum-mechanical modeling of electron tunneling current from the inversion layer of ultra-thin-oxide nMOSFET's

S.-H. Lo, D. A. Buchanan, W. Wang · IEEE Electron Device Letters · 1997 · 812 citations

Engineering, Electrical Engineering, Microelectronics +16