Materials Selection Approaches and Fabrication Methods in RF MEMS Switches

RF MEMS switches and switch circuits

Gabriel M. Rebeiz, Jeremy Muldavin · IEEE Microwave Magazine · 2001 · 956 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

RF-MEMS switches for reconfigurable integrated circuits

E. R. Brown · IEEE Transactions on Microwave Theory and Techniques · 1998 · 616 citations

Engineering, Electrical Engineering, Antennas +14

Anisotropic Etching of Silicon

D. B. Lee · Journal of Applied Physics · 1969 · 307 citations

Engineering, Materials Engineering, Materials Science +15

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro et al. · Sensors and Actuators A Physical · 2000 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +9