Publication | Closed Access
Surface modulation to enhance chemical mechanical polishing performance of sliced silicon carbide Si-face
71
Citations
25
References
2020
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringSurface ScienceSurface EngineeringSurface TreatmentSurface ModulationSurface PolishingSurface ProcessingMicrostructure
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