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Chemical mechanical planarization (CMP) of on-axis Si-face SiC wafer using catalyst nanoparticles in slurry

Materials ScienceMaterials EngineeringChemical EngineeringCatalyst NanoparticlesEngineeringWafer Scale ProcessingMaterial ProcessingNanomaterialsNanotechnologyMicrofabricationMaterials FabricationMechanical EngineeringSemiconductor Device FabricationChemical Mechanical PlanarizationCarbide