Precision Engineering · 2017 · 119 citations · 18 references
EngineeringChemical EngineeringMaterials ScienceMaterials ProcessingReaction EngineeringSurface EngineeringCeramic ProcessingChemical CleaningMachiningMechanical CleaningOxidation ReactionsSurface HardeningAdvanced Oxidation ProcessesFenton ReactionHydroxyl Radical GenerationMechanical PolishingSemiconductor Wafer Polishing
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Chemomechanical Polishing of Silicon Carbide
Ling Zhou, V. Audurier, Pirouz Pirouz et al. · Journal of The Electrochemical Society · 1997 · 211 citations